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Structures obtained with RAITH 150 e-beam lithography at INESC MN
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SEM images of structures (1000A Al/150A TiWN2); (a) (b) Obtained with 10kV, Æ20 mm, 44,8 mC/m2(c) (d) obtained with the standard parameters 10kV, Ø20 mm, 35 mC/m2 |
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Structures obtained with RAITH 150 e-beam lithography at INESC MN
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Copyright © 2010 INESC MN; all rights reserved · Last update:27 October 2011 · |
