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Integration of thin-film silicon MEMS with magnetic field sensors (MagMEMS)
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Two applications of hybrid MR / MEMS are envisaged: • Sensor capable of ultra low dc magnetic field detection (picoTesla range) for biomedical applications • On-chip detection of mechanical resonance This work is a collaboration between the MEMS and the Spintronic research groups at INESC-MN |
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A comparison between the spin-valve output and the optical detection of the motion at resonance of the thin-film silicon resonator |
Torsional thin-film silicon resonator with an integrated permanent magnet. The motion of the MEMS structure causes a change in the magnetic field at the position of the integrated spin-valve sensor. |