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Electrostatically actuated ultra-high Q flexural and torsional thin-film silicon paddle resonators
Hydrogenated amorphous silicon electrostatically actuated paddle microresonators were fabricated on glass substrates using thin-film technology. The use of amorphous silicon as the structural material of a microelectromechanical device allows processing temperatures below 110șC offering the possibility of using non-silicon, large-area, low cost and even flexible substrates. The microdevices geometry allows the excitation of flexural and torsional oscillations. The oscillation modes are distinguishable through the dependence of their resonance frequency on the resonators paddle length. Here we show resonance frequencies in the MHz range and quality factors around 103. Parametric amplification was also observed with resonance peaks having quality factors up to 104.
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Top: SEM micrograph of paddle microresonator with a paddle length Lp=12 mm. Bottom: vibration amplitude plotted as a function of the actuation frequency for an Lp=20 mm paddle microresonator operated in vacuum.The high-Q peaks due to the parametric amplification of the fundamental torsional and flexural modes are the 3rd and 4th peaks. |
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