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Thin Film MEMS
Publications
(since 2005)
(For reprints of these publications or those published prior to 2004, please contact Virginia
Chu or João Pedro Conde)
2005
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“Thin
film paddle microresonators with high quality factors fabricated at
temperatures below 100 ºC”, J. Gaspar, T. Adrega, V. Chu and J.P. Conde,
Technical Digest, IEEE MEMS 2005 (2005).
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“Electrostatic Microresonators from doped hydrogenated amorphous and
nanocrystalline silicon thin films”, J. Gaspar, V. Chu and J.P. Conde,
IEEE J. Microelectromechanical Systems
14, 1082 (2005).
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“Electrostatically actuated thin-film amorphous silicon microbridge
resonators”, J. Gaspar, V. Chu and J.P. Conde, J. Appl. Phys. 97,
094501 (2005).
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“Fabrication and Electromechanical Properties of Conductive Polymer
Microbridge Actuators”, G. Zhang, J. Gaspar, V. Chu and J.P. Conde, Mat.
Res. Soc. Symp. Proc., 872, J11.3 (2005).
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“Electrostatically-Actuated Polymer Microresonators”, G. Zhang, J. Gaspar,
V. Chu and J.P. Conde, Appl. Phys. Lett 87, 104104 (2005).
2006
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“Micromechanical properties of amorphous,
nanocrystalline and transition phase Hot-Wire thin-silicon MEMS”, S.B.
Patil, T. Adrega, A. Pimentel, V. Chu and J.P. Conde,
Non-Cryst. Solids
352 1234 (2006).
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“Electrostatically actuated resonance of
amorphous silicon microresonators in water”, T. Adrega, V. Chu and J.P.
Conde, Appl. Phys. Lett.
89, 143109 (2006).
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“Thin film silicon MEMS microresonators
fabricated by hot-wire chemical vapor deposition”, S.B. Patil, T. Adrega, V.
Chu and J.P. Conde, J. Micromech. Microeng. 16, 2730 (2006).
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“Performance of thin-film a-Si:H
microresonators in dissipative media”, T. Adrega, D.M.F. Prazeres, V. Chu
and J.P. Conde, Mat. Res. Soc. Symp. Proc., 910, A20-02 (2006)
2007
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“Conductive Blended Polymer MEMS
Microresonators”, G. Zhang, V. Chu and J.P. Conde,
IEEE J.
Microelectromechanical Systems, in press.
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“Electrostatically-actuated conducting polymer microbridges”, G. Zhang, V.
Chu and J.P. Conde, J. Appl. Phys. 101, 094308 (2007).
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“Electrostatically actuated bilayer
polyimide-based microresonator”, G. Zhang, V. Chu and J.P. Conde, J.
Micromech. Microeng. 17 797 (2007).
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“Surface micromachining of a thin film
microresonator using dry decomposition of a polymer sacrificial layer”, S.B.
Patil, V. Chu and J.P. Conde, J. Vac. Sci. and Technol. B 25,
455 (2007).
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“Flexural
and torsional vibration modes in low temperature thin film silicon paddle
resonators”, T. Adrega, V. Chu and J.P. Conde, App. Phys. Lett. 90,
233502 (2007).
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“Resonance of electrostatically actuated thin-film amorphous
silicon microelectromechanical systems microresonators in aqueous solutions:
effect of solution conductivity and viscosity”, T. Adrega, V. Chu and J.P.
Conde, J. Appl. Phys. 101, 094308 (2007)
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“Performance of Thin Film Silicon MEMS
on Flexible Plastic Substrates”, S. Patil, V. Chu and J.P. Conde, Mat.
Res. Soc. Symp. Proc. 989, 989-A10-02 (2007).
2008
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“Performance of thin film silicon MEMS on flexible
plastic substrates”, S.B. Patil, V. Chu and J.P. Conde, Sens. Actuators
A: Phys., 144, 201 (2008).
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“Hybrid magnetoresistive/microelectromechanical devices
for static field modulation and sensor 1/f noise cancelation”, A.
Guedes, S.B. Patil, S. Cardoso, V. Chu, J.P. Conde and P.P. Freitas, J.
Appl. Phys. 103, 07E924 (2008).
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“Amorphous silicon thin-film transistors gated through an
electrolyte solution”, D. Gonçalves, D.M.F. Prazeres, V. Chu and J.P. Conde,
IEEE Electron Device Lett. 29, 1030 (2008).
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“Hybrid magnetic tunnel junction – MEMS high frequency
field modulator for 1/f noise suppression”, A. Guedes, S. Patil, P.
Wisniowski, V. Chu, J.P. Conde and P.P. Freitas, IEEE Transactions on
Magnetics,
IEEE Trans. Magn. 44, 2554 (2008).
2009
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“Comparison of the mechanical and resonance properties of
thin film silicon MEMS fabricated at 110 and 250 ºC”,
S.B.
Patil, V. Chu, J.P. Conde,
J. Micromech. Microeng. 19, 025018 (2009).
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“On
chip magnetoresistive detection of resonance in micro-cantilever”, S.B.
Patil, V. Chu, A. Guedes, S. Cardoso, P.P. Freitas, J.P. Conde, Appl. Phys.
Lett. 95, 023502 (2009)
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“Microscopic and macroscopic manifestations of percolation transitions in a
semiconductor composite”, D. Azulay, O. Millo, E. Savir, J.P. Conde, I.
Balberg Phys. Rev. B 80, 245312 (2009).
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“Mass
Sensing using an Amorphous Silicon MEMS resonator”,
S.B.
Patil, V. Chu, J.P. Conde,
Proceedings of the Eurosensors XXIII conference, Procedia Chemistry 1,
1063 (2009).
2010
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J. Gaspar, O. Paul, V. Chu, J.P. Conde, “Mechanical
properties of thin silicon films deposited at low temperatures by PECVD”, J.
Micromech. Microeng. 20, 035022 (2010).
doi:10.1088/0960-1317/20/3/035022
2011
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A. Gualdino, V. Chu, J.P. Conde, “Thin
film amorphous silicon bulk-mode disk resonators fabricated on glass
substrates”, Mater. Res.
Soc. Symp. Proc. 1299, (2011), DOI: 10.1557/opl.2011.62 .
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P. M. Sousa, V. Chu, J. P. Conde, “Reliability
and stability of thin-film amorphous silicon MEMS on glass substrates”,
Mater. Res. Soc. Symp. Proc.
1299, (2011), DOI: 10.1557/opl.2011.253
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